The invention relates to a microscanner system comprising: a microscanner which is formed in a substrate, in particular in a semiconductor chip, and has a deflection element which is suspended so as to be rotatably oscillatable about at least one oscillation axis and has a surface designed as a mirror surface for deflecting electromagnetic radiation incident on the mirror surface; a radiation source, in particular a laser radiation source, for emitting an electromagnetic beam to be reflected at the deflection element; an encapsulation for encapsulating, in particular vacuum encapsulating, the microscanner, the encapsulation having a window region which is at least partially transparent to the beam after its deflection at the deflection element; and a deflection device having an at least partially reflective reflection surface for deflecting the electromagnetic beam, which can be emitted by the radiation source, onto the mirror surface. The radiation source is arranged and orientated such that a beam path of the beam at least partially passes through a radiation passage region in the substrate to the deflection device. Moreover, the deflection device is arranged in or on the encapsulation or is integrally formed therewith.
- 출원번호 : EP2024/066118
- 출원인 : OQMENTED GMBH
- 특허번호 :
- IPC : G02B-026/08(2006.01);G02B-026/10(2006.01);