The invention relates to a method for manufacturing a projection lens for imaging a pattern arranged in an object plane of the projection lens onto an image plane of the projection lens, said method comprising the following steps: assembling the projection lens by arranging a plurality of optical elements in accordance with a specification in such a way that optical surfaces of the optical elements form a projection beam path through which a pattern arranged in the object plane can be imaged onto the image plane by means of the optical elements, wherein at least one manipulator of a wavefront manipulation system is integrated in order to dynamically influence the wavefront of the projection radiation in response to control signals from a control unit of the wavefront manipulation system, wherein the manipulator comprises at least one manipulator element having at least one manipulator surface arranged in the projection beam path, and comprises an actuating device, which can be controlled by control signals from the control unit, for reversibly altering the optical effect of the manipulator element; measuring the projection lens, involving spatially resolved determination of the wavefront, for the spatially resolved determination of wavefront errors, wherein the manipulator element has a starting configuration during the measurement; calculating a first configuration of the manipulator element, which first configuration is suitable for correcting the wavefront errors; defining a first operating mode of the control unit, wherein, in the first operating mode, the control unit generates first control signals that cause the actuating device to set the manipulator element to the first configuration.
- 출원번호 : EP2024/066044
- 출원인 : CARL ZEISS SMT GMBH
- 특허번호 :
- IPC : G03F-007/20(2006.01);G02B-026/08(2006.01);