The present disclosure provides a semiconductor structure and a system for manufacturing the semiconductor structure. The system includes a fabrication equipment, configured to perform operations to form a layer on a wafer; an exposure equipment, configured to perform patterning operations to form a pattern of the layer; and an alignment equipment, configured to detect an alignment of two overlay marks at different elevations on the wafer. The alignment equipment includes a stage, configured to support the wafer; an optical device, configured to emit a radiation to excite a photoluminescent material of one of the two overlay marks; an optical filter, configured to receive and filter a radiation emitted from the photoluminescent material; and an optical detector, configured to convert an optical signal filtered by the optical filter to an electrical signal.

• 출원번호 : 19001623
• 출원인 : WANG, CHENG-WEI
• 특허번호 :
• IPC : G03F-007/00(2006.01);G01B-011/25(2006.01);G03F-007/20(2006.01);H01L-023/544(2006.01);

Provided is a method of filling a gap with a flowable oxide film. In one embodiment of the disclosure, the method comprises forming a flowable silicon nitride film, followed by converting the silicon nitride film in a silicon oxide film. The silicon nitride film may be formed by supplying an oligomeric silicon source and a nitrogen source activated by a power. The silicon nitride film may be converted into the silicon oxide film by supplying an oxygen source while applying a Vacuum UV radiation. The Vacuum UV radiation may be applied in a pulsed mode.

• 출원번호 : 18991851
• 출원인 : Yong, SangHeon
• 특허번호 :
• IPC : H01L-021/02(2006.01)

In an embodiment an arrangement includes a plurality of optoelectronic semiconductor components arranged in a common plane, wherein each semiconductor component is laterally delimited by side faces, and wherein each semiconductor component has a semiconductor body with an active region configured to emit electromagnetic radiation, a radiation outlet side configured to couple out the electromagnetic radiation, a rear face opposite to the radiation outlet side, and a contact structure arranged on the rear face. The arrangement further includes an output element, an electrically insulating insulation layer and an electrical connection structure, wherein the insulation layer is arranged between side faces of adjacent semiconductor components and is absorbent or reflective of the electromagnetic radiation.

• 출원번호 : 18990679
• 출원인 : Schwarz, Thomas
• 특허번호 :
• IPC : H10H-029/24(2025.01);H10H-029/03(2025.01);H10H-029/85(2025.01);H10H-029/852(2025.01);

The present disclosure provides a device and a method for measuring levelness of a top cover of a reactor pressure vessel. The device includes a mounting and fixing mechanism, an inclination sensor mounting base, and an inclination sensor. The mounting and fixing mechanism includes a mounting bottom plate, and a fixing mechanism disposed on the mounting bottom plate. The inclination sensor mounting base includes a bearing plate located on the mounting bottom plate, and a portal frame disposed on the bearing plate and having a top surface. The inclination sensor is mounted on a sensor mounting surface of the bearing plate and located in the portal frame, and configured to obtain levelness of the sealing surface of the top cover by measuring levelness of the sensor mounting surface of the bearing plate.

• 출원번호 : 18988121
• 출원인 : JIANGSU NUCLEAR POWER CORPORATION
• 특허번호 : 12276527
• IPC : G01C-009/02(2006.01);G21C-017/00(2006.01);

A multi-beam charged particle beam system includes a multi-beam forming unit with a lower sensitivity to secondary electrons, scattered charge particles and x-ray radiation. Thereby, a plurality of primary charged particle beamlets can be generated with higher precision and with a longer lifetime of a multi-beam forming unit. The system and method are applicable for an inspection of samples, for example for wafer or mask inspection.

• 출원번호 : 18988751
• 출원인 : Veit, Christian
• 특허번호 :
• IPC : H01J-037/09(2006.01);H01J-037/26(2006.01);

Loudspeaker enclosures that support improved acoustic radiation efficiency at low audible frequencies without compromising acoustic radiation efficiency at mid and high audible frequencies. Embodiments include enclosures having a primary chamber and a secondary chamber acoustically coupled to the primary chamber via a passive radiator. The geometrical characteristics of the secondary chamber and the corresponding air plenum are tailored for enhanced efficiency at low frequencies.

• 출원번호 : 18987519
• 출원인 : Cross, Alan Robert
• 특허번호 :
• IPC : H04R-001/28(2006.01);H04R-001/02(2006.01);H04R-001/22(2006.01);

Systems and methods are disclosed for increasing a nuclear spin polarization in a target compound. A parahydrogenated solution can be generated using a solvent, parahydrogen gas, and a precursor of the target compound. A polarized solution containing the hyperpolarized target compound can be generated using a polarization device and the parahydrogenated solution. The polarization device can include a polarization chamber, one or more radiofrequency (RF) coils disposed around the polarization region, a magnetic field source disposed around the polarization region, and an RF waveform generator configurable to apply a polarization transfer waveform to the one or more RF coils. The polarization chamber can include a polarization region having a volume of at least 10 milliliters (mL). The magnetic field source can be configured to provide a mean magnetic field strength of at most 200 millitesla (mT). A purified fraction can be separated from the polarized solution using a purification system.

• 출원번호 : 18988633
• 출원인 : NVISION IMAGING TECHNOLOGIES GMBH
• 특허번호 :
• IPC : G01R-033/28(2006.01);G01R-033/30(2006.01);G01R-033/31(2006.01);G01R-033/42(2006.01);G01R-033/465(2006.01);

A radiation-sensitive resin composition includes a polymer, solubility of which in a developer solution is capable of being altered by an action of an acid, and which has a first structural unit represented by the following formula (1); a radiation-sensitive acid generating agent; and an acid diffusion control agent having a monovalent radiation-sensitive onium cation and a monovalent organic acid anion.

• 출원번호 : 18985206
• 출원인 : JSR CORPORATION
• 특허번호 :
• IPC : G03F-007/004(2006.01);C08F-002/50(2006.01);C08F-020/10(2006.01);

A first radiation conductor layer is provided in a multilayer body. A second radiation conductor layer is provided in or on the multilayer body, is located above the first radiation conductor layer, and overlaps the first radiation conductor layer when viewed in an up-down direction. A first floating conductor has a shape surrounding at least a part of a periphery of the first radiation conductor layer when viewed in the up-down direction, is located on a same layer as or above the first radiation conductor layer and on a same layer as or below the second radiation conductor layer in the up-down direction, and is not electrically connected to any conductor present in or on the multilayer body. A second floating conductor has a shape surrounding at least a part of a periphery of the second radiation conductor layer.

• 출원번호 : 18985110
• 출원인 : Murata Manufacturing Co., Ltd.
• 특허번호 :
• IPC : H01Q-009/04(2006.01);H01Q-001/48(2006.01);

A radiation shielding overlay for a portion of a valve controller or a valve assembly. The radiation shielding overlay includes a layer including a base material and a second material infused within the base material. The base material has a first density and the second material has a second density higher than the first density, increasing a density of the layer. The layer is adapted to be disposed over a surface of a housing of a valve controller or a valve assembly, such that the layer blocks radiation from reaching a component disposed within the housing.

• 출원번호 : 18984630
• 출원인 : Abbs, Tyler M.
• 특허번호 :
• IPC : G21F-001/08(2006.01);B22F-010/10(2021.01);B22F-012/58(2021.01);B28B-001/00(2006.01);B33Y-010/00(2015.01);B33Y-040/00(2020.01);B33Y-080/00(2015.01);F16K-051/00(2006.01);G21F-003/00(2006.01);