A furnace door structure for a diffusion furnace, and a diffusion furnace. The furnace door structure comprises a metal furnace door, a hanging assembly, and a heat radiation blocking piece, and the metal furnace door is movably connected to the heat radiation blocking piece by means of the hanging assembly. The heat radiation blocking piece in the present invention is hung on the metal furnace door to form a combined furnace door structure, thereby simultaneously avoiding the fragility of a furnace door made of a quartz material and the contamination of a furnace door made of a metal material to a diffusion process. Due to the use of hanging installation, installation and disassembly of the heat radiation blocking piece and the metal furnace door are easier, and adjustment is more convenient.
- 출원번호 : CN2024/113564
- 출원인 : JIANGSU LEADMICRO NANO TECHNOLOGY CO., LTD.
- 특허번호 :
- IPC : F27D-001/18(2006.01);C30B-031/06(2006.01);H01L-021/22(2006.01);